Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate
2007-08-07
2007-08-07
Smith, Bradley K (Department: 2891)
Semiconductor device manufacturing: process
Radiation or energy treatment modifying properties of...
C257SE21347
Reexamination Certificate
active
10825888
ABSTRACT:
Methods and apparatus for improving mechanical properties of a dielectric film on a substrate are provided. In some embodiments, the dielectric film is a carbon-doped oxide (CDO). The methods involve the use of modulated ultraviolet radiation to increase the mechanical strength while limiting shrinkage and limiting any increases in the dielectric constant of the film. Methods improve film hardness, modulus and cohesive strength, which provide better integration capability and improved performance in the subsequent device fabrication procedures such as chemical mechanical polishing (CMP) and packaging.
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Bandyopadhyay Ananda K.
Cho Seon-Mee
Fu Haiying
Mordo David
Srinivasan Easwar
Beyer Weaver LLP.
Novellus Systems Inc.
Smith Bradley K
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