Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate
2007-06-28
2009-11-03
Cleveland, Michael (Department: 1792)
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
C427S249100, C427S372200
Reexamination Certificate
active
07611757
ABSTRACT:
Methods and apparatus for improving mechanical properties of a dielectric film on a substrate are provided. In some embodiments, the dielectric film is a carbon-doped oxide (CDO). The methods involve the use of modulated ultraviolet radiation to increase the mechanical strength while limiting shrinkage and limiting any increases in the dielectric constant of the film. Methods improve film hardness, modulus and cohesive strength, which provide better integration capability and improved performance in the subsequent device fabrication procedures such as chemical mechanical polishing (CMP) and packaging.
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Bandyopadhyay Ananda K.
Cho Seon-Mee
Fu Haiying
Mordo David
Srinivasan Easwar
Cleveland Michael
Novellus Systems Inc.
Weaver Austin Villeneuve & Sampson LLP
Wieczorek Michael
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