4. Coating processes
  5. Nonuniform coating

Duy-Vu N. Deo

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Abrasive composition for the integrated circuit electronics...

Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate

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Apparatus and method for supplying chemicals

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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BARC/resist via etchback process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Bilayered metal hardmasks for use in dual damascene etch...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Chalcogenide memory and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Bulk effect device – Bulk effect switching in amorphous material
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