4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Douglas Van Den Broeke

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CPL mask and a method and program product for generating the...

Etching a substrate: processes – Forming or treating mask used for its nonetching function
Reexamination Certificate

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Eigen decomposition based OPC model

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Eigen decomposition based OPC model

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Method and apparatus for defining mask patterns utilizing a...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Method and apparatus for generating OPC rules for placement...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Profile ID: LFUS-PAI-P-2378308

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