4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Stacked capacitor

Douglas L. Keil

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Controlling plasma processing using parameters derived...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Magnetic enhancement for mechanical confinement of plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Magnetic enhancement for mechanical confinement of plasma

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Methods of forming memory cell capacitor plates in memory...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Plasma in-situ treatment of chemically amplified resist

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Profile ID: LFUS-PAI-P-2045332

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