4. Electric heating
  5. Metal heating
  6. By arc

Donna L. Smatlak

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Continuous, real time microwave plasma element sensor

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
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Electron injection in ion implanter magnets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Ion source configuration for production of ionized clusters,...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and apparatus for determining beam parallelism and...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Techniques for confining electrons in an ion implanter

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1131712

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