Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-11-08
2008-12-02
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S427000, C250S307000, C250S310000, C250S300000, C250S251000, C250S42300F, C250S492300, C250S425000, C250S426000, C250S289000, C250S492200, C438S300000, C438S061000, C438S513000, C438S528000, C257SE21345, C257SE21607, C257SE21143, C257SE21433, C315S111810, C315S231000, C315S111210, C313S230000, C313S359100, C313S363100, C376S144000
Reexamination Certificate
active
07459704
ABSTRACT:
Ion sources and methods for generating molecular ions in a cold operating mode and for generating atomic ions in a hot operating mode are provided. In some embodiments, first and second electron sources are located at opposite ends of an arc chamber. The first electron source is energized in the cold operating mode, and the second electron source is energized in the hot operating mode. In other embodiments, electrons are directed through a hole in a cathode in the cold operating mode and are directed at the cathode in the hot operating mode. In further embodiments, an ion beam generator includes a molecular ion source, an atomic ion source and a switching element to select the output of one of the ion sources.
REFERENCES:
patent: 6452338 (2002-09-01), Horsky
Deckerlucke Kurt
Kurunczi Peter
Low Russell J.
Murphy Paul
Olson Joseph C.
Berman Jack I
Sahu Meenakshi S
Varian Semiconductor Equipment Associates Inc.
LandOfFree
Ion source configuration for production of ionized clusters,... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ion source configuration for production of ionized clusters,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion source configuration for production of ionized clusters,... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4036411