Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
Inventor
active
Integration of a diffusion barrier layer and a counter dopant re
Method of based spacer formation for ultra-small sapcer geometri
Reduction of dopant diffusion by the co-implantation of impuriti
Resistance to gate dielectric breakdown at the edges of shallow
Ultra short transistor channel length dictated by the width...
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