Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Compound semi-conductors and controlled doping thereof
Compound semiconductor and controlled doping thereof
Method for growth of crystal surfaces and growth of heteroepitax
Method for growth of crystal surfaces and growth of heteroepitax
Process for the controlled growth of single-crystal films of sil
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