4. Data processing: measuring, calibrating, or testing
  5. Calibration or correction system

Daniel Prager

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Feature dimension deviation correction system, method and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Iso/nested cascading trim control with model feedback updates

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method and apparatus for creating a gate optimization...

Data processing: measuring – calibrating – or testing – Calibration or correction system
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Multi-layer/multi-input/multi-output (MLMIMO) models and...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Optical metrology model optimization for process control

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-2319675

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