4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Chun-Feng Nieh

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Advanced activation approach for MOS devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for obtaining quality ultra-shallow doped regions and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Semiconductor device having ultra-shallow and highly...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – With pn junction isolation
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Shallow junction formation and high dopant activation rate...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Source/drain carbon implant and RTA anneal, pre-SiGe deposition

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Plural recrystallized semiconductor layers
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Profile ID: LFUS-PAI-P-2323471

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