4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Christopher A. Spence

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Attenuated phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Attenuated phase shift mask comprising phase shifting layer with

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Characterization and synthesis of OPC structures by fourier...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Device and method for determining an illumination intensity...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Forming local interconnects in integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Profile ID: LFUS-PAI-P-369043

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