4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Having liquid and vapor etching steps

Christian Zistl

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Depth of focus (DOF) for trench-first-via-last (TFVL)...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method of defining small openings in dielectric layers

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming a semiconductor device with metal silicide...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of patterning a low-k dielectric using a hard mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Resist trim process to define small openings in dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2059666

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