4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Choon Kun Ryu

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Method and apparatus for depositing a planarized passivation lay

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Method and apparatus for improving gap-fill capability using che

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Method and apparatus for improving gap-fill capability using...

Abrading – Precision device or process - or with condition responsive... – Condition responsive control for sandblasting
Reexamination Certificate

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Method for forming isolation film in semiconductor device

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Method for forming isolation layer in semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1125665

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