4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Chia-Shiung Tsai

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Achievement of top rounding in shallow trench etch

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Adding SF.sub.6 gas to improve metal undercut for hardmask metal

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Aqueous ammonium hydroxide amorphous silicon etch method for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Atomic layer deposition (ALD) method with enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Backside illuminated sensor processing

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-321605

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