4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Charles C. H. Wu & Associates, APC

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Dynamic random access memory structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method for forming multi-layered liner on sidewall of node...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for manufacturing two-bit flash memory

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of fabricating a bit line of flash memory

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of fabricating shallow trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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