4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Chang-Ki Hong

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Apparatus for drying substrate and method thereof

Fluent material handling – with receiver or receiver coacting mea – Plural materials – material supplies or charges in a receiver
Reexamination Certificate

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Apparatus for polishing a wafer and method for detecting a...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Chemical mechanical polishing apparatus

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Cleaning composition and method of cleaning a semiconductor...

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Cleaning solution and cleaning method of a semiconductor device

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
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Profile ID: LFUS-PAI-P-2670410

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