4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Chan-Lon Yang

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Aluminum-filled via structure with barrier layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Cleaning method for copper dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Eliminating etching microloading effect by in situ...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Gate etch process

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Profile ID: LFUS-PAI-P-316894

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