4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

Benjamin Bierman

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Co-rotating edge ring extension for use in a semiconductor proce

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Gas introduction showerhead for an RTP chamber with upper and lo

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Lift pin and support pin apparatus for a processing chamber

Material or article handling – Article reorienting device – Article frictionally engaged and rotated by relatively...
Patent

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Magnetically-levitated rotor system for an RTP chamber

Electrical generator or motor structure – Dynamoelectric – Rotary
Patent

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Method and apparatus for achieving temperature uniformity of a s

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With a step of measuring – testing – or sensing
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Profile ID: LFUS-PAI-P-590890

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