Lift pin and support pin apparatus for a processing chamber

Details Lift pin and support pin apparatus for a processing chamber Lift pin and support pin apparatus for a processing chamber

1996-07-24

1999-03-09

Bucci, David A.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

414935, 414939, B05C 1300

Patent

active

058791280

ABSTRACT:
A substrate support mechanism including a housing made of a magnetically permeable material; a pin located substantially within the housing and having an upper end extending up into a passage which extends up through the bottom of the chamber and into the cavity which contains a substrate during processing; a first magnet assembly on the inside of the housing and mounted on the pin; a carriage structure located outside of the housing; and a second magnet assembly mounted on the carriage structure, wherein the first and second magnet assemblies are positioned relative to each other so that the second magnet assembly causes the pin and the first magnet assembly to magnetically levitate within the housing.

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patent: 5636963 (1997-06-01), Haraguchi et al.
patent: 5730801 (1998-03-01), Tepman et al.

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