Magnetically-levitated rotor system for an RTP chamber

Details Magnetically-levitated rotor system for an RTP chamber Magnetically-levitated rotor system for an RTP chamber

1997-05-16

2000-12-05

Enad, Elvin

Electrical generator or motor structure

Dynamoelectric

Rotary

310 86, 118730, H02K 709

Patent

active

061571067

ABSTRACT:
Accomodations for a magnetically levitated rotating system in an RTP chamber are provided. The system includes a magnetically permeable rotor; a cylindrical thin wall concentric with and surrounding the rotor; and a magnetic stator assembly adjacent the cylindrical thin wall. The radial distance between the rotor and the magnetic stator assembly is small enough that a magnetic field created by the stator assembly magnetically levitates the rotor but is great enough that the rotor does not physically contact the thin wall upon thermal expansion. The system is such that the relative positions of a plurality of sensors which determine the position of a rotating frame is maintained upon dismantling. Thermal isolation of the area including the rotor is accomplished from the reactive gases in a processing area of the RTP chamber. The rotor may be cooled by a number of cooling chambers formed within the chamber.

REFERENCES:
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5527393 (1996-06-01), Sato et al.
patent: 5660472 (1997-08-01), Peuse et al.
patent: 5755511 (1998-05-01), Peuse et al.
patent: 5884412 (1999-03-01), Tietz et al.
patent: 5960555 (1999-10-01), Deaton et al.
patent: 6035100 (2000-03-01), Bierman et al.
patent: 6048403 (2000-04-01), Deaton et al.

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