Electric resistance heating devices – Heating devices – Radiant heater
Patent
1996-07-24
1998-07-14
Jeffery, John A.
Electric resistance heating devices
Heating devices
Radiant heater
219411, 118724, 239555, 432 77, H01L 2120
Patent
active
057816930
ABSTRACT:
A showerhead for use with a lamp head in a thermal processing chamber, the lamp head including a high intensity source which emits radiation that heats a substrate within the chamber, the showerhead including a top window on a side of the showerhead that is adjacent to the lamp head; a bottom window on a side of the showerhead that is adjacent to the substrate during processing; and a gas supply inlet through which a gas is introduced into a space between the top and bottom windows, wherein the top and bottom windows are transparent to the radiation from the source in the lamp head and wherein the bottom window includes a plurality of gas distribution holes through which gas is injected from the space between the top and bottom windows into the chamber.
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patent: 5653806 (1997-08-01), Van Buskirk
Ballance David S.
Bierman Benjamin
Tietz James V.
Applied Materials Inc.
Jeffery John A.
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