Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
A.C. plasma processing system
Apparatus and method for a magnetron cathode with moving magnet
Circuit for reversing polarity on electrodes
Magnetron sputtering apparatus and process
Method and apparatus for periodic polarity reversal during an ac
No associations
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Profile ID: LFUS-PAI-P-52223