4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Plural coatings applied by vapor, gas, or smoke

ASM Genitech Korea Ltd.

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Atomic layer deposition apparatus

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate

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Method of depositing Ru films having high density

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods of forming an amorphous silicon thin film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Plasma enhanced atomic layer deposition (PEALD) equipment...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Plasma inducing plate for semiconductor deposition apparatus

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent

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