Corporate Assignee
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
Corporate Assignee
active
No affiliations
In-situ wide area vacuum ultraviolet lamp
Mounting of a cold cathode directly to a vacuum chamber wall
Soft vacuum electron beam patterning apparatus and process
Wide area soft vacuum abnormal glow electron beam discharge hard
Wide area source of multiply ionized atomic or molecular species
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