4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

Antonio Luis Pacheco Rotondaro

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Bilayer deposition to avoid unwanted interfacial reactions...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Control of high-k gate dielectric film composition profile...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Defect control in gate dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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High-K gate dielectric defect gettering using dopants

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for the selective removal of high-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Profile ID: LFUS-PAI-P-2915235

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