Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
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Back end interconnect with a shaped interface
Back end interconnect with a shaped interface
Bilayered metal hardmasks for use in dual damascene etch...
Bilayered metal hardmasks for use in Dual Damascene etch...
Copper interconnection structure incorporating a metal seed...
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