Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Cathode assembly having rotating magnetic-field shunt and method
DC magnetron sputtering method and apparatus
Magnetron sputter gun target assembly with distributed magnetic
Method for forming a thin carbon overcoat in a magnetic recordin
Single chamber sputtering assembly
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Profile ID: LFUS-PAI-P-26380