4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Alexander Matthijs Struycken

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Contamination prevention system, lithographic apparatus,...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Ex-situ removal of deposition on an optical element

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and use...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and use...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus, measurement system, and device...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2255087

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