Contamination prevention system, lithographic apparatus,...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

Reexamination Certificate

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C355S053000

Reexamination Certificate

active

07602472

ABSTRACT:
A contamination prevention system is constructed and arranged to prevent material from propagating with radiation into a lithographic apparatus. The contamination prevention system includes a rotatable carrier provided with a plurality of generally radially outwardly extending blades. The blades are constructed and arranged to absorb or deflect the material. The system also includes a stationary shaft, and a bearing constructed and arranged to rotate the rotatable carrier and the blades around the shaft. The rotatable carrier is provided with a space for at least partially receiving a portion of the shaft.

REFERENCES:
patent: 2007/0115445 (2007-05-01), Box et al.
patent: 2007/0228290 (2007-10-01), Wildenberg
patent: 2008/0157006 (2008-07-01), Wilhelmus Van Herpen et al.
patent: 2008/0231820 (2008-09-01), Wassink

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