Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-06-12
2009-10-13
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07602472
ABSTRACT:
A contamination prevention system is constructed and arranged to prevent material from propagating with radiation into a lithographic apparatus. The contamination prevention system includes a rotatable carrier provided with a plurality of generally radially outwardly extending blades. The blades are constructed and arranged to absorb or deflect the material. The system also includes a stationary shaft, and a bearing constructed and arranged to rotate the rotatable carrier and the blades around the shaft. The rotatable carrier is provided with a space for at least partially receiving a portion of the shaft.
REFERENCES:
patent: 2007/0115445 (2007-05-01), Box et al.
patent: 2007/0228290 (2007-10-01), Wildenberg
patent: 2008/0157006 (2008-07-01), Wilhelmus Van Herpen et al.
patent: 2008/0231820 (2008-09-01), Wassink
Bijlaart Erik Theodorus Maria
Brom Paul Peter Anna Antonius
Buis Edwin Johan
Hoogendam Christiaan Alexander
Struycken Alexander Matthijs
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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