Lithographic apparatus, device manufacturing method, and use...

Details Lithographic apparatus, device manufacturing method, and use... Lithographic apparatus, device manufacturing method, and use...

2005-10-19

2008-12-09

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S50400H, C378S185000, C378S034000, C355S030000, C355S067000

Reexamination Certificate

active

07462841

ABSTRACT:
A lithographic apparatus, comprising a collector being constructed to receive radiation from a radiation source and transmit radiation to an illumination system, wherein the collector is provided with at least one fluid duct, the apparatus including a temperature conditioner to thermally condition the collector utilizing the fluid duct of the collector, the temperature conditioner being configured to feed a first fluid to the fluid duct during a first period, and to feed a second fluid to the fluid duct during at least a second period.

REFERENCES:
patent: 6964485 (2005-11-01), Singer et al.
patent: 7088424 (2006-08-01), Bakker et al.
patent: 2003/0043455 (2003-03-01), Singer et al.
patent: 2004/0109151 (2004-06-01), Bakker et al.
patent: 2005/0105066 (2005-05-01), Franken
patent: 2005/0157284 (2005-07-01), Moors et al.
patent: 2007/0084461 (2007-04-01), Box et al.
Notice of Allowance issued for U.S. Appl. No. 11/455,943, dated Oct. 7, 2008.

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