Lithographic apparatus, device manufacturing method, and use...

Details Lithographic apparatus, device manufacturing method, and use... Lithographic apparatus, device manufacturing method, and use...

2011-03-01

2011-03-01

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492220, C250S492100, C250S50400H, C250S372000, C355S030000, C378S034000, C378S185000

Reexamination Certificate

active

07897941

ABSTRACT:
A lithographic apparatus, comprising a collector being constructed to receive radiation from a radiation source and transmit radiation to an illumination system, wherein the collector is provided with at least one fluid duct, the apparatus including a temperature conditioner to thermally condition the collector utilizing the fluid duct of the collector, the temperature conditioner being configured to feed a first fluid to the fluid duct during a first period, and to feed a second fluid to the fluid duct during at least a second period.

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