Lithographic apparatus, measurement system, and device...

Details Lithographic apparatus, measurement system, and device... Lithographic apparatus, measurement system, and device...

2006-09-05

2006-09-05

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C356S399000

Reexamination Certificate

active

07102729

ABSTRACT:
The invention pertains to a measurement system for measuring displacement of a moveable object relative to a base in at least a first direction of measurement, the moveable object having at least one reference part that is moveable in a plane of movement relative to the base, the actual movements of the reference part being within an area of said plane of movement that is bounded by a closed contour having a shape. The measurement system comprises a sensor head that operatively communicates with a planar element. The sensor head is mounted onto the base and the planar element being mounted onto the reference part of the moveable object or the other way around, wherein the planar element has a shape that is essentially identical to the shape of the closed contour.

REFERENCES:
patent: 5721607 (1998-02-01), Ota
patent: 6278957 (2001-08-01), Yasuda et al.
patent: 6819425 (2004-11-01), Kwan
patent: 6850333 (2005-02-01), Johnson et al.
patent: 6906782 (2005-06-01), Nishi
patent: 2002/0041380 (2002-04-01), Kwan
patent: 2004/0027586 (2004-02-01), Ichikawa et al.

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