4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Albert E. Ozias

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Apparatus for improving the reactant gas flow in a reaction cham

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Apparatus for improving the reactant gas flow in a reaction cham

Coating processes – Coating by vapor – gas – or smoke
Patent

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Chemical vapor deposition system

Valves and valve actuation – Pivoted valves
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Chemical vapor desposition system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Drive shaft apparatus for a susceptor

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
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Profile ID: LFUS-PAI-P-51129

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