Drive shaft apparatus for a susceptor

Details Drive shaft apparatus for a susceptor Drive shaft apparatus for a susceptor

1990-06-15

1992-06-02

Bueker, Richard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

118725, 118730, 118500, C23C 1600

Patent

active

051177692

ABSTRACT:
A hollow drive shaft mounted within a tubular shaft depending from a reaction chamber supports a substrate receiving susceptor to effect rotation of the susceptor.

REFERENCES:
patent: 4714594 (1987-12-01), Mircea
patent: 4770121 (1988-09-01), Ebata et al.
patent: 4839145 (1989-06-01), Gale et al.

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