4. Dynamic information storage or retrieval
  5. Information location or remote operator actuated control
  6. Selective addressing of storage medium

Alan Wong

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Characterization of induced shift on an overlay target using...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
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Characterizing resist line shrinkage due to CD-SEM inspection

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Device having etched feature with shrinkage carryover

Radiant energy – Inspection of solids or liquids by charged particles
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Dynamic sampling with efficient model for overlay

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Enhanced uniqueness for pattern recognition

Semiconductor device manufacturing: process – With measuring or testing
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Profile ID: LFUS-PAI-P-956535

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