Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2007-02-16
2009-08-04
Do, Thuan (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000
Reexamination Certificate
active
07571420
ABSTRACT:
The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
REFERENCES:
patent: 7298496 (2007-11-01), Hill
patent: 2004/0022444 (2004-02-01), Rhoads
patent: 2004/0162687 (2004-08-01), Smith
Chen George
Drautz Jeff
Lau Max
Shindler Joseph D.
Wong Alan
Chen George
Do Thuan
Intel Corporation
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