Dynamic sampling with efficient model for overlay

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C716S030000, C716S030000

Reexamination Certificate

active

07571420

ABSTRACT:
The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.

REFERENCES:
patent: 7298496 (2007-11-01), Hill
patent: 2004/0022444 (2004-02-01), Rhoads
patent: 2004/0162687 (2004-08-01), Smith

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Dynamic sampling with efficient model for overlay does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dynamic sampling with efficient model for overlay, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dynamic sampling with efficient model for overlay will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4129961

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.