Device having etched feature with shrinkage carryover

Details Device having etched feature with shrinkage carryover Device having etched feature with shrinkage carryover

2007-09-28

2010-11-09

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S297000, C250S492300, C356S635000, C356S636000, C438S008000, C252S079100, C156S345150, C156S345240

Reexamination Certificate

active

07829852

ABSTRACT:
In an embodiment of the present invention, a device includes a first etched feature located in a critical dimension scanning electron microscope (CD-SEM) characterization location, the first etched feature having an upper section, a middle section, and a lower section wherein the middle section is severely shrunk relative to a corresponding middle section of a second etched feature having similar dimensions and composition that is not located in a CD-SEM characterization location. In another embodiment of the present invention, the middle section of the first etched feature has a shrinkage carryover exceeding a threshold. In still another embodiment of the present invention, the middle section of the first etched feature exhibits a line edge roughness.

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