Corporate Assignee
Optical: systems and elements
Optical modulator
Light wave temporal modulation
Corporate Assignee
active
No affiliations
MEMS mirror with drive rotation amplification of mirror...
MEMS mirror with drive rotation amplification of mirror...
MEMS scanning mirror with distributed hinges and multiple...
MEMS scanning mirror with trenched surface and I-beam like...
MEMS scanning mirror with tunable natural frequency
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