Registers – Coded record sensors – Particular sensor structure
Reexamination Certificate
2006-03-21
2006-03-21
Lee, Diane I. (Department: 2876)
Registers
Coded record sensors
Particular sensor structure
C216S002000, C310S309000, C359S214100, C359S224200, C359S298000
Reexamination Certificate
active
07014115
ABSTRACT:
A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.
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German Office Action including English translation, 9 pages.
Advanced Nano Systems, Inc.
Hsia David C.
Lee Diane I.
Lee Seung H
Patent Law Group LLP
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