Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
Fully-sealed or vacuum-maintained chamber
Inventor
active
Low 1c screw dislocation 3 inch silicon carbide wafer
Low basal plane dislocation bulk grown SiC wafers
Low micropipe 100 mm silicon carbide wafer
Low micropipe 100 mm silicon carbide wafer
One hundred millimeter high purity semi-insulating single...
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