Wafer level global bitmap characterization in integrated...

Details Wafer level global bitmap characterization in integrated... Wafer level global bitmap characterization in integrated...

2006-11-14

2006-11-14

Thompson, A. M. (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C365S232000, C703S013000, C714S027000, C714S030000, C714S724000

Reexamination Certificate

active

07137085

ABSTRACT:
A system and method for wafer level global bitmap characterization include determining chip level defect data bitmaps from a semiconductor wafer, and consolidating the chip level defect data bitmaps into a global wafer level bitmap that characterizes substantially the entire wafer failure configuration. The global wafer level bitmap is then analyzed and compared with other global wafer level bitmaps to develop correlations thereamong and develop global wafer level bitmap definitions for conducting at least one of wafer-to-wafer, boat-to-boat, and lot-to-lot process analysis based upon the global wafer level bitmap definitions.

REFERENCES:
patent: 6185707 (2001-02-01), Smith et al.
patent: 6336086 (2002-01-01), Perez et al.
patent: 6367040 (2002-04-01), Ott et al.
patent: 6745370 (2004-06-01), Segal et al.
patent: 6775817 (2004-08-01), Ono et al.
patent: 6842866 (2005-01-01), Song et al.
patent: 2002/0199136 (2002-12-01), Ku
patent: 2004/0083407 (2004-04-01), Song et al.
patent: 2004/0233767 (2004-11-01), Wu et al.
patent: 2005/0097500 (2005-05-01), Ye et al.

Affiliated with

Also associated with

Rating

Wafer level global bitmap characterization in integrated... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer level global bitmap characterization in integrated..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer level global bitmap characterization in integrated... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3688926