Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1995-10-13
1998-02-03
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250305, 250307, H01J 3708
Patent
active
057147574
ABSTRACT:
A surface analyzing method comprising an ion generation step for generating multiply-charged ions of specific ion species and specific charge state; a deceleration step for decelerating the generated multiply-charged ions to a lower kinetic energy than an energy of threshold of sputtering of an objective material; an irradiation step for irradiating the decelerated multiply-charged ions on the surface of a sample; and an analysis step for analyzing particles or light emitted from the surface of said sample by the irradiation of said multiply-charged ions. Apparatus is provided for carrying out the method. Since the ions irradiated on the sample surface are multiply-charged ions having a lower kinetic energy than that of threshold of sputtering of materials constituting a sample, the irradiated ions interact merely with the top surface layer of the sample whereby analyzed information merely from the top surface layer of the sample can be obtained, and as a result, the kind of atoms of the top surface layer of the sample and the bonding state of said atoms can be analyzed with high sensitivity and high resolution.
REFERENCES:
patent: 5327475 (1994-07-01), Golovanivsky et al.
E. S. Parilis et al; "Atomic Collisions on Solid Surface", North-Holland Publisher, 1992, chap. 12 (Cited on p. 2, line 17-18 in our specification).
P. Varga et al.; Nucl. Instrum. & Meth. B58 (1990) 417. (Cited on p. 2, line 20-21 in our specification).
U. Diebold and P. Varga; "Desorption Induced by Electronic Transitions IV", Springer-Verlag, 1990, p. 193. (Cited on p. 2, line 21-23 in our specification).
Itabashi Naoshi
Kanehori Keiichi
Mochiji Kozo
Osabe Satoshi
Shichi Hiroyasu
Anderson Bruce
Hitachi , Ltd.
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