4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Naoshi Itabashi

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Method of manufacturing semiconductor devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Plasma etching apparatus and plasma etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
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Plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Profile ID: LFUS-PAI-P-576466

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