4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Kozo Mochiji

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Linearly polarized X-ray patterning process

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Mask for X-ray lithography and process for producing the same

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Method for forming pattern by using graft copolymerization

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent

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Method for production of graft copolymer, pattern replication me

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent

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Method of forming a pattern

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Profile ID: LFUS-PAI-P-68077

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