X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Reexamination Certificate
2004-11-08
2009-11-24
Song, Hoon (Department: 2882)
X-ray or gamma ray systems or devices
Specific application
Telescope or microscope
C359S368000
Reexamination Certificate
active
07623620
ABSTRACT:
There is provided a reflective X-ray microscope for examining an object in an object plane. The reflective X-ray microscope includes (a) a first subsystem, having a first mirror and a second mirror, disposed in a beam path from the object plane to the image plane, and (b) a second subsystem, having a third mirror, situated downstream of the first subsystem in the beam path. The object is illuminated with radiation having a wavelength <100 nm, and the reflective X-ray microscope projects the object with magnification into an image plane.
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Dinger Udo
Engel Thomas
Harnisch Wolfgang
Mann Hans-Jürgen
Pauschinger Dieter
Carl Zeiss SMT AG
Ohlandt Greeley Ruggiero & Perle L.L.P.
Song Hoon
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