4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Carl Zeiss SMT AG

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6-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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6-mirror projection objective with few lenses

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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Profile ID: LFUS-PAI-P-2180929

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