Programmable, scanned-probe microscope system and method

Details Programmable, scanned-probe microscope system and method Programmable, scanned-probe microscope system and method

1995-01-20

1995-11-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, 73105, H01J 3728

Patent

active

054669359

ABSTRACT:
Scanned-probe microscope systems (20, 140) are disclosed with analog control loops (24, 144) that can be electronically programmed to select from a plurality of transfer functions. The amplitude of the control loop reference signal (64) can also be electronically programmed. A controller (26) enables an operator to quickly program these operational characteristics. The controller preferably includes a visual display (33) and a recording device (32) to facilitate the programming and to display and store the scanning data obtained with the selected characteristics.

REFERENCES:
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patent: 4724318 (1988-02-01), Binnig
patent: 4800274 (1989-01-01), Hansma et al.
patent: 5025658 (1991-06-01), Elings et al.
patent: 5066858 (1991-11-01), Elings et al.
patent: 5260572 (1993-11-01), Marshall
Kuk et al., Rev. Sci. Instrum. 60(2), Feb. 1989, pp. 165-180.
Marti, O., et al., "Atomic Force Microscopy of Liquid-Covered Surfaces", Journal of Applied Physics Letters 51, (7) Aug. 17, 1987, pp. 484-486.
Martin, Y., et al., "Atomic Force Microscope-Force Maping and Profiling", Journal of Applied Physics 61, (10), May 15, 1987, pp. 4723-4729.
Hanselmann, H., "Implementation of Digital Controllers", Automatica, vol. 23, No. 1, 1987.
Wickramasinghe, H. Kumar, "Scanned Probe Microscopes", Scientific American, Oct., 1989.

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