Profile control platen

Details Profile control platen Profile control platen

2005-07-05

2005-07-05

Rose, Robert A. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S504000

Reexamination Certificate

active

06913518

ABSTRACT:
A platen for chemical mechanical polishing of a substrate includes a surface upon which a polishing pad can be placed, a support structure, and a controller. The surface has a first region and a second region and is operable to exert force against the polishing pad during polishing. The support structure is located beneath the second region and is operable to cause the second region to exert more force than the first region. The controller is operable to adjust the amount of force that is exerted by the second region.

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patent: 6267659 (2001-07-01), Chen et al.
patent: 0744009 (1970-07-01), None

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