Process to make high-k transistor dielectrics

Details Process to make high-k transistor dielectrics Process to make high-k transistor dielectrics

2006-08-08

2006-08-08

Schillinger, Laura M. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

75

Reexamination Certificate

active

07087480

ABSTRACT:
A method of reducing impurities in a high-k dielectric layer comprising the following steps. A substrate is provided. A high-k dielectric layer having impurities is formed over the substrate. The high-k dielectric layer being formed by an MOCVD or an ALCVD process. The high-k dielectric layer is annealed to reduce the impurities within the high-k dielectric layer.

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